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The field of modern biotechnology is generally thought of as having been born in 1971 when Paul Berg's (Stanford) experiments in gene splicing had early success. [[Herbert Boyer|Herbert W. Boyer]] (Univ. Calif. at San Francisco) and [[Stanley Norman Cohen|Stanley N. Cohen]] (Stanford) significantly advanced the new technology in 1972 by transferring genetic material into a bacterium, such that the imported material would be reproduced. The commercial viability of a biotechnology industry was significantly expanded on June 16, 1980, when the [[United States Supreme Court]] ruled that a [[genetic engineering|genetically modified]] [[microorganism]] could be [[patent]]ed in the case of ''[[Diamond v. Chakrabarty]]''.<ref name="DiamondvChakrabarty">"[http://caselaw.lp.findlaw.com/scripts/getcase.pl?court=us&vol=447&invol=303 Diamond v. Chakrabarty, 447 U.S. 303 (1980). No. 79-139] {{Webarchive|url=https://web.archive.org/web/20110628191938/http://caselaw.lp.findlaw.com/scripts/getcase.pl?court=us&vol=447&invol=303 |date=June 28, 2011 }}." ''[[United States Supreme Court]].'' June 16, 1980. Retrieved on May 4, 2007.</ref> Indian-born [[Ananda Mohan Chakrabarty|Ananda Chakrabarty]], working for [[General Electric]], had modified a bacterium (of the genus ''[[Pseudomonas]]'') capable of breaking down crude oil, which he proposed to use in treating oil spills. (Chakrabarty's work did not involve gene manipulation but rather the transfer of entire organelles between strains of the ''Pseudomonas'' bacterium).{{cn|date=May 2024}}
 
The [[MOSFET]] invented at Bell Labs between 1955 and 1960,<ref>{{Cite patent|number=US2802760A|title=Oxidation of semiconductive surfaces for controlled diffusion|gdate=1957-08-13|invent1=Lincoln|invent2=Frosch|inventor1-first=Derick|inventor2-first=Carl J.|url=https://patents.google.com/patent/US2802760A}}</ref><ref name=":02">{{Cite journal |last1=Huff |first1=Howard |last2=Riordan |first2=Michael |date=2007-09-01 |title=Frosch and Derick: Fifty Years Later (Foreword) |url=https://iopscience.iop.org/article/10.1149/2.F02073IF |journal=The Electrochemical Society Interface |volume=16 |issue=3 |pages=29 |doi=10.1149/2.F02073IF |issn=1064-8208}}</ref><ref>{{Cite journal |last1=Frosch |first1=C. J. |last2=Derick |first2=L |date=1957 |title=Surface Protection and Selective Masking during Diffusion in Silicon |url=https://iopscience.iop.org/article/10.1149/1.2428650 |journal=Journal of the Electrochemical Society |language=en |volume=104 |issue=9 |pages=547 |doi=10.1149/1.2428650}}</ref><ref>{{Cite journal |last=KAHNG |first=D. |date=1961 |title=Silicon-Silicon Dioxide Surface Device |url=https://doi.org/10.1142/9789814503464_0076 |journal=Technical Memorandum of Bell Laboratories |pages=583–596 |doi=10.1142/9789814503464_0076 |isbn=978-981-02-0209-5}}</ref><ref>{{Cite book |last=Lojek |first=Bo |title=History of Semiconductor Engineering |date=2007 |publisher=Springer-Verlag Berlin Heidelberg |isbn=978-3-540-34258-8 |location=Berlin, Heidelberg |page=321}}</ref><ref>{{Cite journal |last1=Ligenza |first1=J.R. |last2=Spitzer |first2=W.G. |date=1960 |title=The mechanisms for silicon oxidation in steam and oxygen |url=https://linkinghub.elsevier.com/retrieve/pii/0022369760902195 |journal=Journal of Physics and Chemistry of Solids |language=en |volume=14 |pages=131–136 |bibcode=1960JPCS...14..131L |doi=10.1016/0022-3697(60)90219-5}}</ref><ref name="Lojek1202">{{cite book |last1=Lojek |first1=Bo |title=History of Semiconductor Engineering |date=2007 |publisher=[[Springer Science & Business Media]] |isbn=9783540342588 |page=120}}</ref> Two years later, [[Leland C. Clark]] and Champ Lyons invented the first [[biosensor]] in 1962.<ref name="Park">{{Cite journal |last1=Park |first1=Jeho |last2=Nguyen |first2=Hoang Hiep |last3=Woubit |first3=Abdela |last4=Kim |first4=Moonil |s2cid=55557610 |date=2014 |title=Applications of Field-Effect Transistor (FET){{ndash}}Type Biosensors |journal=[[Applied Science and Convergence Technology]] |volume=23 |issue=2 |pages=61–71 |doi=10.5757/ASCT.2014.23.2.61 |issn=2288-6559|doi-access=free }}</ref><ref>{{Cite journal |last1=Clark |first1=Leland C. |last2=Lyons |first2=Champ |date=1962 |title=Electrode Systems for Continuous Monitoring in Cardiovascular Surgery |journal=Annals of the New York Academy of Sciences |volume=102 |issue=1 |pages=29–45 |bibcode=1962NYASA.102...29C |doi=10.1111/j.1749-6632.1962.tb13623.x |issn=1749-6632 |pmid=14021529 |s2cid=33342483 |author1-link=Leland Clark}}</ref> [[Bio-FET|Biosensor MOSFETs]] were later developed, and they have since been widely used to measure [[physics|physical]], [[chemistry|chemical]], [[biological]] and [[Ecology|environmental]] parameters.<ref name="Bergveld">{{Cite journal |last=Bergveld |first=Piet |date=October 1985 |title=The impact of MOSFET-based sensors |url=https://core.ac.uk/download/pdf/11473091.pdf |archive-url=https://ghostarchive.org/archive/20221009/https://core.ac.uk/download/pdf/11473091.pdf |archive-date=2022-10-09 |url-status=live |journal=Sensors and Actuators |volume=8 |issue=2 |pages=109–127 |bibcode=1985SeAc....8..109B |doi=10.1016/0250-6874(85)87009-8 |issn=0250-6874 |author1-link=Piet Bergveld}}</ref> The first BioFET was the [[ion-sensitive field-effect transistor]] (ISFET), invented by [[Piet Bergveld]] in 1970.<ref>{{Cite journal |last1=Chris Toumazou |last2=Pantelis Georgiou |date=December 2011 |title=40 years of ISFET technology:From neuronal sensing to DNA sequencing |url=https://www.researchgate.net/publication/260616066 |journal=[[Electronics Letters]] |access-date=May 13, 2016}}</ref><ref name="Bergveld1970">{{Cite journal |last=Bergveld |first=P. |date=January 1970 |title=Development of an Ion-Sensitive Solid-State Device for Neurophysiological Measurements |journal=[[IEEE Transactions on Biomedical Engineering]] |volume=BME-17 |issue=1 |pages=70–71 |doi=10.1109/TBME.1970.4502688 |pmid=5441220}}</ref> It is a special type of MOSFET,<ref name="Bergveld" /> where the [[metal gate]] is replaced by an [[ion]]-sensitive [[membrane]], [[electrolyte]] solution and [[reference electrode]].<ref name="Schoning">{{Cite journal |last1=Schöning |first1=Michael J. |last2=Poghossian |first2=Arshak |date=September 10, 2002 |title=Recent advances in biologically sensitive field-effect transistors (BioFETs) |url=http://juser.fz-juelich.de/record/16078/files/12968.pdf |archive-url=https://ghostarchive.org/archive/20221009/http://juser.fz-juelich.de/record/16078/files/12968.pdf |archive-date=2022-10-09 |url-status=live |journal=Analyst |volume=127 |issue=9 |pages=1137–1151 |bibcode=2002Ana...127.1137S |doi=10.1039/B204444G |issn=1364-5528 |pmid=12375833}}</ref> The ISFET is widely used in [[biomedical]] applications, such as the detection of [[DNA hybridization]], [[biomarker]] detection from [[blood]], [[antibody]] detection, [[glucose]] measurement, [[pH]] sensing, and [[genetic technology]].<ref name="Schoning" />
 
By the mid-1980s, other BioFETs had been developed, including the [[gas sensor]] FET (GASFET), [[pressure sensor]] FET (PRESSFET), [[chemical field-effect transistor]] (ChemFET), [[ISFET|reference ISFET]] (REFET), enzyme-modified FET (ENFET) and immunologically modified FET (IMFET).<ref name="Bergveld" /> By the early 2000s, BioFETs such as the [[DNA field-effect transistor]] (DNAFET), [[Genetically modified|gene-modified]] FET (GenFET) and [[Membrane potential|cell-potential]] BioFET (CPFET) had been developed.<ref name="Schoning" />